MONITORING EROSION OF SYSTEM COMPONENTS BY OPTICAL EMISSION

Details for Australian Patent Application No. 2003296396 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors LUDVIKSSON, Audunn; STRANG, Eric, J.

Pub. Number AU-A-2003296396

PCT Number PCT/US2003/0391

PCT Pub. Number WO2004/061429

Priority 10/331,456 31.12.02 US

Filing date 24 December 2003

Wipo publication date 29 July 2004

International Classifications

G01N 021/00 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

G01J 003/443 Spectrometry - Emission spectrometry

Event Publications

6 May 2004 Complete Application Filed

  Priority application(s): 10/331,456 31.12.02 US

2 September 2004 Application Open to Public Inspection

  Published as AU-A-2003296396

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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