SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES USING DENSE PHASE GAS AND SONIC WAVES

Details for Australian Patent Application No. 2003296299 (hide)

International Classifications

Event Publications

29 April 2004 Complete Application Filed

Priority application(s): 10/299,596 18.11.02 US

15 July 2004 Application Open to Public Inspection

Published as AU-A-2003296299

25 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

1 September 2005 Corrigenda

Applications OPI - Name Index Under the name RECIF, Application No. 2003296299, under INID (71) correct the name to read RECIF; TECHSONIC

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