OPTICAL SUBASSEMBLY AND PROJECTION OBJECTIVE IN SEMICONDUCTOR LITHOGRAPHY

Details for Australian Patent Application No. 2003296244 (hide)

Owner CARL ZEISS SMT AG

Inventors KWAN, Yim-Bun, Patrick; FROMMEYER, Andreas; MORRISON, Fraser, G.; HEINTEL, Willi; KIRCHNER, Harald; KELLER, Wolfgang

Pub. Number AU-A-2003296244

PCT Number PCT/EP2003/0136

PCT Pub. Number WO2005/040926

Priority 103 46 046.2 02.10.03 DE

Filing date 3 December 2003

Wipo publication date 11 May 2005

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 007/00 Mountings, adjusting means, or light-tight connections, for optical elements

G02B 007/18 Mountings, adjusting means, or light-tight connections, for optical elements - for prisms

Event Publications

29 April 2004 Complete Application Filed

  Priority application(s): 103 46 046.2 02.10.03 DE

30 June 2005 Application Open to Public Inspection

  Published as AU-A-2003296244

22 June 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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