ILLUMINATION OPTICAL SYSTEM, ILLUMINATING DEVICE, PROJECTION EXPOSURE APPARATUS AND EXPOSURE METHOD

Details for Australian Patent Application No. 2003296167 (hide)

Owner NIKON CORPORATION

Inventors SUZUKI, Kenji; MITARAI, Kiyoshi

Pub. Number AU-A-2003296167

PCT Number PCT/JP2003/0170

PCT Pub. Number WO2004/068564

Priority 2002-377149 26.12.02 JP; 2003-076492 19.03.03 JP; 2003-173974 18.06.03 JP

Filing date 26 December 2003

Wipo publication date 23 August 2004

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G21K 005/02 Irradiation devices - having no beam-forming means

G02B 005/08 Optical elements other than lenses - Mirrors

G02B 027/18 Other optical systems - for optical projection, e.g. combination of mirror and condenser and objective

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G21K 001/06 Arrangements for handling radiation or particles, e.g. focusing, moderating

Event Publications

29 April 2004 Complete Application Filed

  Priority application(s): 2002-377149 26.12.02 JP; 2003-076492 19.03.03 JP; 2003-173974 18.06.03 JP

23 September 2004 Application Open to Public Inspection

  Published as AU-A-2003296167

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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