VACUUM DEPOSITION APPARATUS AND VAPOR-DEPOSITED FILM MANUFACTURING METHOD

Details for Australian Patent Application No. 2003292634 (hide)

Owner APPLIED FILMS GMBH AND CO. KG TOPPAN PRINTING CO., LTD.

Inventors SASAKI, Noboru; KOIZUMI, Fumitake; ARAI, Kunimasa; KONAGAI, Hiroyuki; IMAI, Nobuhiko; SUZUKI, Hiroshi

Pub. Number AU-A-2003292634

PCT Number PCT/JP2003/0168

PCT Pub. Number WO2004/059032

Priority 2002-376933 26.12.02 JP

Filing date 26 December 2003

Wipo publication date 22 July 2004

International Classifications

C23C 016/54 Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 2002-376933 26.12.02 JP

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2003292634

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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