METHOD FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTOR WAFER IN A RAPID THERMAL PROCESSING SYSTEM

Details for Australian Patent Application No. 2003292147 (hide)

Owner MATTSON THERMAL PRODUCTS GMBH

Inventors HAUF, Markus; MERKL, Christoph; STRIEBEL, Christoph

Pub. Number AU-A-2003292147

PCT Number PCT/EP2003/0133

PCT Pub. Number WO2004/059271

Priority 103 29 107.5 27.06.03 DE; 102 60 673.0 23.12.02 DE

Filing date 28 November 2003

Wipo publication date 22 July 2004

International Classifications

G01J 005/00 Radiation pyrometry

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 103 29 107.5 27.06.03 DE; 102 60 673.0 23.12.02 DE

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2003292147

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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