AN EXTRACTOR FOR AN MICROCOLOUM, AN ALIGNMENT METHOD FOR AN EXTRACTOR APERTURE TO AN ELECTON EMITTER, AND A MEASURING METHOD AND AN ALIGNMENT METHOD USING THEREOF

Details for Australian Patent Application No. 2003289574 (hide)

Owner CEBT CO., LTD.

Inventors AHN, Seung Joon; KIM, Dae Wook; KIM, Ho Seob

Pub. Number AU-A-2003289574

PCT Number PCT/KR2003/0029

PCT Pub. Number WO2004/059690

Priority 10-2002-0087224 30.12.02 KR; 10-2002-0087226 30.12.02 KR

Filing date 30 December 2003

Wipo publication date 22 July 2004

International Classifications

H01J 037/06 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Electron sources

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 10-2002-0087224 30.12.02 KR; 10-2002-0087226 30.12.02 KR

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2003289574

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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