MICRO ELECTROMECHANICAL SYSTEMS FOR DELIVERING HIGH PURITY FLUIDS IN A CHEMICAL DELIVERY SYSTEM

Details for Australian Patent Application No. 2003288636 (hide)

Owner L'AIR LIQUIDE - SOCIETE ANONYME A DIRECTOIRE ET CO

Inventors ZNAMENSKY, Dmitry; ZDUNEK, Alan, D.

Pub. Number AU-A-2003288636

PCT Number PCT/IB2003/0061

PCT Pub. Number WO2004/058425

Priority 60/436,731 27.12.02 US; 60/436,732 27.12.02 US; 10/733,761 12.12.03 US

Filing date 19 December 2003

Wipo publication date 22 July 2004

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 60/436,731 27.12.02 US; 60/436,732 27.12.02 US; 10/733,761 12.12.03 US

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2003288636

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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