APPARATUS FOR PROCESSING AN OBJECT WITH HIGH POSITION ACCURANCY

Details for Australian Patent Application No. 2003288583 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors VAN EIJK, Jan; BAKKER, Arjan, F.; BOS, Dennis, E.; COMPTER, Johan, C.; DE KLERK, Angelo, C., P.; ROES, Franciscus, M.; VROOMEN, Hubert, G., J., J., A.; WARMERDAM, Thomas, P., H.

Pub. Number AU-A-2003288583

PCT Number PCT/IB2003/0059

PCT Pub. Number WO2004/055607

Priority 02080317.7 16.12.02 EP

Filing date 15 December 2003

Wipo publication date 9 July 2004

International Classifications

G05B 019/00 Programme-control systems

H02K 041/03 Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path - Synchronous motors

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

H01J 037/20 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Means for supporting or positioning the object or the material

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 02080317.7 16.12.02 EP

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003288583

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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