ELECTROPOLISHING SYSTEM AND PROCESS

Details for Australian Patent Application No. 2003285491 (hide)

Owner NUTOOL, INC

Inventors TALIEH, Homayoun; BASOL,Bulent, M.

Pub. Number AU-A-2003285491

PCT Number PCT/GB2003/0048

PCT Pub. Number WO2004/044273

Priority 60/425,694 12.11.02 US; 10/391,924 18.03.03 US

Filing date 6 November 2003

Wipo publication date 3 June 2004

International Classifications

C25F 003/30 Electrolytic etching or polishing

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C25F 007/00 Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 60/425,694 12.11.02 US; 10/391,924 18.03.03 US

8 July 2004 Application Open to Public Inspection

  Published as AU-A-2003285491

28 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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