IMPROVEMENTS TO SHOWERHEADS

Details for Australian Patent Application No. 2003282533 (hide)

Owner TRIKON TECHNOLOGIES LIMITED

Inventors SCHLOTTMAN, Ole

Pub. Number AU-A-2003282533

PCT Number PCT/GB2003/0031

PCT Pub. Number WO2004/015165

Priority 60/401,769 08.08.02 US; 0218371.3 08.08.02 GB

Filing date 16 July 2003

Wipo publication date 25 February 2004

International Classifications

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 60/401,769 08.08.02 US; 0218371.3 08.08.02 GB

8 April 2004 Application Open to Public Inspection

  Published as AU-A-2003282533

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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