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Details for Australian Patent Application No. 2003282513 (hide)

Owner MATTSON TECHNOLOGY, INC.

Inventors TAY, Sing-Pin; HU, Yao-Zhi

Pub. Number AU-A-2003282513

PCT Number PCT/US2003/0319

PCT Pub. Number WO2004/036630

Priority 10/272,462 16.10.02 US

Filing date 9 October 2003

Wipo publication date 4 May 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 10/272,462 16.10.02 US

10 June 2004 Application Open to Public Inspection

  Published as AU-A-2003282513

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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