HIGH-POWER PULSED MAGNETRON SPUTTERING

Details for Australian Patent Application No. 2003278984 (hide)

Owner ZOND, INC.

Inventors CHISTYAKOV, Roman

Pub. Number AU-A-2003278984

PCT Number PCT/US03/30427

PCT Pub. Number WO2004/031435

Priority 10/065,277 30.09.02 US

Filing date 26 September 2003

Wipo publication date 23 April 2004

International Classifications

C23C 014/00 Coating by vacuum evaporation, by sputtering or by ion implantation

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 10/065,277 30.09.02 US

27 May 2004 Application Open to Public Inspection

  Published as AU-A-2003278984

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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