METHOD, COMPOSITION AND APPARATUS FOR TUNABLE SELECTIVITY DURING CHEMICAL MECHANICAL POLISHING OF METALLIC STRUCTURES

Details for Australian Patent Application No. 2003278883 (hide)

Event Publications

26 February 2004 Complete Application Filed

Priority application(s): 10/263,063 01.10.02 US

27 May 2004 Application Open to Public Inspection

Published as AU-A-2003278883

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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