VACUUM SPUTTERING CATHODE

Details for Australian Patent Application No. 2003273424 (hide)

Owner TECMACHINE

Inventors AULAGNER, Michel; LABALME, Lionel

Pub. Number AU-A-2003273424

PCT Number PCT/FR03/02111

PCT Pub. Number WO2004/008479

Priority 02/08869 10.07.02 FR

Filing date 8 July 2003

Wipo publication date 2 February 2004

International Classifications

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

5 February 2004 Complete Application Filed

  Priority application(s): 02/08869 10.07.02 FR

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003273424

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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