EUV PROJECTION LENS WITH MIRRORS MADE FROM MATERIALS WITH DIFFERING SIGNS FOR THE RISE IN TEMPERATURE DEPENDENCE OF THE THERMAL EXPANSION COEFFICIENT AROUND THE ZERO TRANSITION TEMPERATURE

Details for Australian Patent Application No. 2003273409 (hide)

Owner CARL ZEISS SMT AG

Inventors DINGER, Udo; EISERT, Frank; KOEHLER, Stefan; OCHSE, Andreas; ZELLNER, Johannes; LOWISCH, Martin; LAUFER, Timo

Pub. Number AU-A-2003273409

PCT Number PCT/EP03/10761

PCT Pub. Number WO2005/040925

Filing date 27 September 2003

Wipo publication date 11 May 2005

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 017/06 Systems with reflecting surfaces, with or without refracting elements

G21K 001/06 Arrangements for handling radiation or particles, e.g. focusing, moderating

Event Publications

5 February 2004 Complete Application Filed

30 June 2005 Application Open to Public Inspection

  Published as AU-A-2003273409

15 June 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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