DEVICE FOR SEALING A PROJECTION ILLUMINATION SYSTEM

Details for Australian Patent Application No. 2003273394 (hide)

Owner CARL ZEISS SMT AG

Inventors GAIL, Lothar; SCHIERHOLZ, Wilfried; JOST, Eberhard; HOF, Albrecht; MAUL, Gunter

Pub. Number AU-A-2003273394

PCT Number PCT/EP03/09427

PCT Pub. Number WO2004/025368

Priority 102 39 344.3 28.08.02 DE

Filing date 26 August 2003

Wipo publication date 30 April 2004

International Classifications

G03F 007/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

Event Publications

5 February 2004 Complete Application Filed

  Priority application(s): 102 39 344.3 28.08.02 DE

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003273394

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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