ILLUMINATION MASK FOR RANGERESOLVED DETECTION OF SCATTERED LIGHT

Details for Australian Patent Application No. 2003267402 (hide)

Owner CARL ZEISS SMT AG

Inventors STUHLER, Joachim; ARNZ, Michael; GROMER, Oswald; KLOSE, Gerd

Pub. Number AU-A-2003267402

PCT Number PCT/EP03/10604

PCT Pub. Number WO2005/015313

Priority 103 36 299.1 04.08.03 DE

Filing date 24 September 2003

Wipo publication date 25 February 2005

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

8 January 2004 Complete Application Filed

  Priority application(s): 103 36 299.1 04.08.03 DE

7 April 2005 Application Open to Public Inspection

  Published as AU-A-2003267402

27 April 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003267403-OPTICAL SENSOR FOR DETERMINING THE CONCENTRATIONS OF DYES AND/OR PARTICLES IN LIQUID OR GASEOUS MEDIA AND METHOD FOR OPERATING THE SAME

2003267401-NOVEL MHC II ASSOCIATED PEPTIDES