METHOD AND APPARATUS FOR SUPPLYING SUBSTRATES TO A PROCESSING TOOL

Details for Australian Patent Application No. 2003265798 (hide)

Owner APPLIED MATERIALS, INC.

Inventors HUDGENS, Jeffrey, C.; ENGLHARDT, Eric, A.; ELLIOTT, Martin, R.; RICE, Michael, R.; LOWRANCE, Robert, B.

Pub. Number AU-A-2003265798

PCT Number PCT/US03/26918

PCT Pub. Number WO2004/021411

Priority 60/407,336 31.08.02 US

Filing date 28 August 2003

Wipo publication date 19 March 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): 60/407,336 31.08.02 US

6 May 2004 Application Open to Public Inspection

  Published as AU-A-2003265798

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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