METHOD AND APPARATUS FOR FORMING EPITAXIAL LAYERS

Details for Australian Patent Application No. 2003255919 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors MEUNIER-BEILLARD, Philippe; CAYMAX, Mathieu, R., J.

Pub. Number AU-A-2003255919

PCT Number PCT/IB03/03635

PCT Pub. Number WO2004/031457

Priority 02079085.3 03.10.02 EP

Filing date 13 August 2003

Wipo publication date 23 April 2004

International Classifications

C30B 025/02 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Epitaxial-layer growth

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/04 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 November 2003 Complete Application Filed

  Priority application(s): 02079085.3 03.10.02 EP

27 May 2004 Application Open to Public Inspection

  Published as AU-A-2003255919

23 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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