ETCHANT AND ETCHING METHOD

Details for Australian Patent Application No. 2003252362 (hide)

Owner DAIKIN INDUSTRIES, LTD.

Inventors ITANO, Mitsushi; KANEMURA, Takashi; MOMOTA, Hiroshi; WATANABE, Daisuke

Pub. Number AU-A-2003252362

PCT Number PCT/JP03/09848

PCT Pub. Number WO2004/025718

Priority 2002-269291 13.09.02 JP; 2002-346823 29.11.02 JP

Filing date 4 August 2003

Wipo publication date 30 April 2004

International Classifications

H01L 021/308 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 2002-269291 13.09.02 JP; 2002-346823 29.11.02 JP

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003252362

2 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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