Work transfer means, image recognition device, and positioning method

Details for Australian Patent Application No. 2003252342 (hide)

Owner Nec Machinery Corporation

Inventors Kitamura, Shoji

Pub. Number AU-A-2003252342

PCT Number PCT/JP03/09668

PCT Pub. Number WO2005/013354

Filing date 30 July 2003

Wipo publication date 15 February 2005

International Classifications

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/52 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B25J 015/06 Gripping heads - with vacuum or magnetic holding means

B25J 019/04 Accessories fitted to manipulators, e.g. for monitoring, for viewing

Event Publications

16 October 2003 Complete Application Filed

18 August 2005 Application Open to Public Inspection

  Published as AU-A-2003252342

13 April 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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