METHOD AND DEVICE FOR LASER BEAM PROCESSING OF SILICON SUBSTRATE, AND METHOD AND DEVICE FOR LASER BEAM CUTTING OF SILICON WIRING

Details for Australian Patent Application No. 2003252278 (hide)

Owner SUMITOMO PRECISION PRODUCTS CO., LTD.

Inventors ARAKI, Ryuta

Pub. Number AU-A-2003252278

PCT Number PCT/JP03/09557

PCT Pub. Number WO2004/012253

Priority 2002-220036 29.07.02 JP

Filing date 28 July 2003

Wipo publication date 16 February 2004

International Classifications

H01L 021/3205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/82 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C30B 033/08 After-treatment of single crystals or homogeneous polycrystalline material with defined structure

C30B 029/06 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape - Silicon

H01L 021/822 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 027/04 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - the substrate being a semiconductor body

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 2002-220036 29.07.02 JP

25 March 2004 Application Open to Public Inspection

  Published as AU-A-2003252278

28 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003252279-Packing machine, packing method, and packing system

2003252277-FOOD ADDITIVE COMPOSITION AND FOOD CONTAINING THE SAME