DIFFRACTIVE OPTICS, DIOPTRIC ELEMENT, ILLUMINATING OPTICAL SYSTEM, EXPOSURE SYSTEM AND EXPOSURE METHOD

Details for Australian Patent Application No. 2003252251 (hide)

Owner NIKON CORPORATION

Inventors GOTO, Akihiro

Pub. Number AU-A-2003252251

PCT Number PCT/JP03/09353

PCT Pub. Number WO2004/011968

Priority 2002-218094 26.07.02 JP

Filing date 23 July 2003

Wipo publication date 16 February 2004

International Classifications

G02B 005/18 Optical elements other than lenses - Diffracting gratings

G02B 003/00 Simple or compound lenses

G02B 003/08 Simple or compound lenses - with discontinuous faces, e.g. Fresnel lens

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 2002-218094 26.07.02 JP

25 March 2004 Application Open to Public Inspection

  Published as AU-A-2003252251

21 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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