METHOD OF MANUFACTURING CMOS DEVICES BY THE IMPLANTATION OF NAND P-TYPE CLUSTER IONS AND NEGATIVE IONS

Details for Australian Patent Application No. 2003247495 (hide)

Owner SEMEQUIP, INC.

Inventors KRULL, Wade, A.; HORSKY, Thomas, N.; JACOBSON, Dale, C.

Pub. Number AU-A-2003247495

PCT Number PCT/US03/17839

PCT Pub. Number WO2004/003990

Priority 10/251,491 20.09.02 US; 60/392,271 26.06.02 US; 60/391,847 26.06.02 US; 10/251,491 20.09.02 US

Filing date 6 June 2003

Wipo publication date 19 January 2004

International Classifications

H01L 021/425 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 October 2003 Complete Application Filed

  Priority application(s): 10/251,491 20.09.02 US; 60/392,271 26.06.02 US; 60/391,847 26.06.02 US; 10/251,491 20.09.02 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003247495

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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