OPTICAL DEVICE COMPRISING AN LIGHT SOURCE

Details for Australian Patent Application No. 2003246548 (hide)

Owner CARL ZEISS SMT AG

Inventors BADER, Dieter; RENG, Norbert; WANGLER, Johannes

Pub. Number AU-A-2003246548

PCT Number PCT/EP03/06397

PCT Pub. Number WO2004/006021

Priority 102 30 652.4 08.07.02 DE

Filing date 18 June 2003

Wipo publication date 23 January 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 019/00 Condensers

Event Publications

2 October 2003 Complete Application Filed

  Priority application(s): 102 30 652.4 08.07.02 DE

11 March 2004 Application Open to Public Inspection

  Published as AU-A-2003246548

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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