DEVELOPER-SOLUBLE METAL ALKOXIDE COATINGS FOR MICROELECTRONIC APPLICATIONS

Details for Australian Patent Application No. 2003245596 (hide)

Owner BREWER SCIENCE, INC.

Inventors KRISHNAMURTHY, Vandana; NEEF, Charles, J.; SNOOK, Juliet, A., M.

Pub. Number AU-A-2003245596

PCT Number PCT/US03/19457

PCT Pub. Number WO2004/001502

Priority 10/180,625 25.06.02 US

Filing date 18 June 2003

Wipo publication date 6 January 2004

International Classifications

G03C 001/735 Photosensitive materials

G03F 007/30 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Imagewise removal using liquid means

G03F 007/36 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Imagewise removal not covered by groups , e.g. using gas streams, using plasma

G03C 001/825 Photosensitive materials - characterised by antireflecting means or visible-light filtering means, e.g. anti-halation

G03C 001/835 Photosensitive materials

G03F 007/09 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - characterised by structural details, e.g. supports, auxiliary layers

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

25 September 2003 Complete Application Filed

  Priority application(s): 10/180,625 25.06.02 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003245596

17 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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