METHOD FOR DEPOSITING INORGANIC/ORGANIC FILMS

Details for Australian Patent Application No. 2003244361 (hide)

Owner NEDERLANDSE ORGANISATIE VOOR TOEGEPASTNATUURWETENSCHAPPELIJK ONDERZOEK TNO TECHNISCHE UNIVERSITEIT EINDHOVEN

Inventors HAMERS, Edward, Aloys, Gerard; LINDEN, Joannes, Leonard; VAN DE SANDEN, Mauritius, Cornelis, Maria; ALCOTT, Gregory, Robert

Pub. Number AU-A-2003244361

PCT Number PCT/NL03/00037

PCT Pub. Number WO2003/066933

Priority 1019781 18.01.02 NL

Filing date 17 January 2003

Wipo publication date 2 September 2003

International Classifications

C23C 016/452 Chemical deposition or plating by decomposition

C23C 016/50 Chemical deposition or plating by decomposition - using electric discharges

C23C 016/517 Chemical deposition or plating by decomposition

Event Publications

18 September 2003 Complete Application Filed

  Priority application(s): 1019781 18.01.02 NL

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2003244361

7 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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