SHEARING INTERFERENCE MEASURING METHOD AND SHEARING INTERFEROMETER, PRODUCTION METHOD OF PROJECTION OPTICAL SYSTEM, PROJECTION OPTICAL SYSTEM, AND PROJECTION EXPOSURE SYSTEM

Details for Australian Patent Application No. 2003244344 (hide)

Owner NIKON CORPORATION

Inventors LIU, Zhigiang

Pub. Number AU-A-2003244344

PCT Number PCT/JP03/00897

PCT Pub. Number WO2003/067182

Priority 2002-030413 07.02.02 JP; 2002-221765 30.07.02 JP

Filing date 30 January 2003

Wipo publication date 2 September 2003

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

Event Publications

18 September 2003 Complete Application Filed

  Priority application(s): 2002-030413 07.02.02 JP; 2002-221765 30.07.02 JP

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2003244344

10 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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