POLISHING FLUID FOR METAL AND POLISHING METHOD

Details for Australian Patent Application No. 2003242397 (hide)

Owner HITACHI CHEMICAL CO., LTD.

Inventors ONO, Hiroshi; MASUDA, Katsuyuki; HABIRO, Masanobu

Pub. Number AU-A-2003242397

PCT Number PCT/JP03/07554

PCT Pub. Number WO2004/111157

Filing date 13 June 2003

Wipo publication date 4 January 2005

International Classifications

C09K 013/00 Etching, surface-brightening or pickling compositions

C09K 003/14 Materials not provided for elsewhere - Anti-slip materials

B24B 037/00 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23F 001/16 Etching metallic material by chemical means

Event Publications

11 September 2003 Complete Application Filed

17 February 2005 Application Open to Public Inspection

  Published as AU-A-2003242397

2 March 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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