METHOD OF POLISHING ORGANIC INSULATING FILM OF SEMICONDUCTOR INTEGRATED CIRCUIT

Details for Australian Patent Application No. 2003242395 (hide)

Owner SEIMI CHEMICAL CO., LTD.

Inventors SHINMARU, Sachie

Pub. Number AU-A-2003242395

PCT Number PCT/JP03/07551

PCT Pub. Number WO2003/107407

Priority 2002-174636 14.06.02 JP

Filing date 13 June 2003

Wipo publication date 31 December 2003

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 2002-174636 14.06.02 JP

26 February 2004 Application Open to Public Inspection

  Published as AU-A-2003242395

3 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

18 August 2005 Corrigenda

  Applications OPI - Name Index Under the name SEIMI CHEMICAL CO., LTD., Application No. 2003242395, under INID (71) correct the name to read ASAHI GLASS COMPANY, LIMITED; SEIMI CHEMICAL CO., LTD.

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