METHOD AND DEVICE FOR CLEANING RAW MATERIAL GAS INTRODUCTION TUBE USED IN CVD FILM FORMING APPARATUS

Details for Australian Patent Application No. 2003242357 (hide)

International Classifications

Event Publications

11 September 2003 Complete Application Filed

Priority application(s): 2002-164151 05.06.02 JP

19 February 2004 Application Open to Public Inspection

Published as AU-A-2003242357

3 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

18 August 2005 Corrigenda

Applications OPI - Name Index Under the name MITSUBISHI SHOJI PLASTICS CORPORATION, Application No. 2003242357, under INID (71) correct the name to read MITSUBISHI SHOJI PLASTICS CORPORATION; YOUTEC CO.,LTD.; KIRIN BREWERY COMPANY, LIMITED

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