Owner Sony Corporation

Inventors Abe, Hitoshi; Orii, Toshihiko,; Nakayama, Shodai; Akimoto, Osamu; Mochida, Toshihiko

Agent Griffith Hack

Pub. Number AU-B-2003242279

PCT Number PCT/JP03/07408

PCT Pub. Number WO2003/104883

Priority 2002-169861 11.06.02 JP

Filing date 11 June 2003

Wipo publication date 22 December 2003

Acceptance publication date 2 October 2008

G02F 1/1368 (2006.01) Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating

G02F 1/1362 (2006.01) Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating

H01L 21/77 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 27/12 (2006.01) Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - the substrate being other than a semiconductor body, e.g. an insulating body