METHOD FOR FABRICATING MICROSTRUCTURE AND MICROSTRUCTURE

Details for Australian Patent Application No. 2003234993 (hide)

Owner FUJITSU LIMITED

Inventors UEDA, Satoshi; SAWAKI, Ippei; MI, Xiaoyu; KOUMA, Norinao; TSUBOI, Osamu; IWAKI, Masafumi; OKUDA, Hisao; SONEDA, Hiromitsu

Pub. Number AU-A-2003234993

PCT Number PCT/JP03/05404

PCT Pub. Number WO2004/103892

Filing date 25 April 2003

Wipo publication date 13 December 2004

International Classifications

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

H01L 029/84 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

Event Publications

28 August 2003 Complete Application Filed

20 January 2005 Application Open to Public Inspection

  Published as AU-A-2003234993

12 January 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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