ROTATING TUBULAR CATHODE

Details for Australian Patent Application No. 2003223879 (hide)

Owner WURCZINGER, Dieter

Inventors WURCZINGER, Dieter

Pub. Number AU-A-2003223879

PCT Number PCT/DE03/00903

PCT Pub. Number WO2003/080891

Priority 102 13 049.3 22.03.02 DE

Filing date 19 March 2003

Wipo publication date 8 October 2003

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 102 13 049.3 22.03.02 DE

13 November 2003 Application Open to Public Inspection

  Published as AU-A-2003223879

9 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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