INTERFEROMETRY SYSTEM ERROR COMPENSATION IN TWIN STAGE LITHOGRAPHY TOOLS

Details for Australian Patent Application No. 2003223545 (hide)

Event Publications

7 August 2003 Complete Application Filed

Priority application(s): 60/371,869 11.04.02 US

4 December 2003 Application Open to Public Inspection

Published as AU-A-2003223545

6 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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