METHOD AND DEVICE FOR THE DECONTAMINATION OF OPTICAL SURFACES

Details for Australian Patent Application No. 2003222757 (hide)

Owner CARL ZEISS SMT AG

Inventors ULLMANN, Jens; MUHLPFORDT, Annette; THIER, Michael; WIESNER, Stefan; LUDECKE, Jens; ZAZCEK, Christoph; PAZIDIS, Alexandra

Pub. Number AU-A-2003222757

PCT Number PCT/EP03/02464

PCT Pub. Number WO2003/076086

Priority 102 11 611.3 12.03.02 DE

Filing date 11 March 2003

Wipo publication date 22 September 2003

International Classifications

B08B 007/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 102 11 611.3 12.03.02 DE

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003222757

2 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003222758-SYSTEM OF INTERVERTEBRAL PROSTHESES

2003222756-Selective herbicides based on substituted aminotriazinones and substituted benzoylcyclohexandiones