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Details for Australian Patent Application No. 2003212324 (hide)

Owner CARL ZEISS SMT AG

Inventors HEIDEMANN, Klaus; OSTERRIED, Karlfried

Pub. Number AU-A-2003212324

PCT Number PCT/EP03/02419

PCT Pub. Number WO2003/081712

Priority 102 12 691.7 21.03.02 DE

Filing date 10 March 2003

Wipo publication date 8 October 2003

Event Publications

24 July 2003 Complete Application Filed

  Priority application(s): 102 12 691.7 21.03.02 DE

13 November 2003 Application Open to Public Inspection

  Published as AU-A-2003212324

9 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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