MOIRE METHOD AND MEASURING SYSTEM FOR MEASURING THE DISTORTION OF AN OPTICAL IMAGING SYSTEM

Details for Australian Patent Application No. 2003212309 (hide)

Owner CARL ZEISS SMT AG

Inventors WEGMANN, Ulrich; SCHELLHORN, Uwe; KLAESGES, Ralph; STUEHLER, Joachim

Pub. Number AU-A-2003212309

PCT Number PCT/EP03/02283

PCT Pub. Number WO2003/076891

Priority 60/362,552 08.03.02 US

Filing date 6 March 2003

Wipo publication date 22 September 2003

International Classifications

G01M 011/00 Testing of optical apparatus

Event Publications

24 July 2003 Complete Application Filed

  Priority application(s): 60/362,552 08.03.02 US

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003212309

25 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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