DEHYDRATION DRYING METHOD AND APPARATUS, AND SUBSTRATE PROCESSING APPARATUS

Details for Australian Patent Application No. 2003210012 (hide)

Owner EBARA CORPORATION

Inventors ATO, Koji; TOGAWA, Tetsuji

Pub. Number AU-A-2003210012

PCT Number PCT/JP03/02553

PCT Pub. Number WO2003/077296

Priority 2002-063244 08.03.02 JP

Filing date 5 March 2003

Wipo publication date 22 September 2003

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

F26B 005/04 Drying solid materials or objects by processes not involving the application of heat - by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum

F26B 005/08 Drying solid materials or objects by processes not involving the application of heat

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 2002-063244 08.03.02 JP

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003210012

25 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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