SUSCEPTOR SYSTEM

Details for Australian Patent Application No. 2002368438 (hide)

Owner ETC SRL

Inventors MACCALLI, Giacomo, Nicolao; KORDINA, Olle; VALENTE, Gianluca; CRIPPA, Danilo; PRETI, Franco

Pub. Number AU-A-2002368438

PCT Number PCT/IT2002/0007

PCT Pub. Number WO2004/053187

Filing date 10 December 2002

Wipo publication date 30 June 2004

International Classifications

C23C 016/46 Chemical deposition or plating by decomposition - characterised by the method used for heating the substrate

C30B 025/12 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Substrate holders or susceptors

C30B 025/10 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Heating of the reaction chamber or the substrate

C30B 031/12 After-treatment of single crystals or homogeneous polycrystalline material with defined structure

H05B 006/02 Heating by electric, magnetic, or electromagnetic fields - Induction heating

F27B 014/06 Crucible or pot furnaces

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

29 July 2004 Complete Application Filed

5 August 2004 Application Open to Public Inspection

  Published as AU-A-2002368438

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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