IONIC PLASMA DEPOSITION APPARATUS

Details for Australian Patent Application No. 2002366086 (hide)

Owner IONIC FUSION CORPORATION

Inventors PETERSON, John, H.; PETERSON, John, H.

Pub. Number AU-A-2002366086

PCT Number PCT/US02/36788

PCT Pub. Number WO2003/044240

Priority 60/335,689 15.11.01 US; 60/376,893 01.05.02 US

Filing date 15 November 2002

Wipo publication date 10 June 2003

International Classifications

C23C 014/32 Coating by vacuum evaporation, by sputtering or by ion implantation - by explosion

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 60/335,689 15.11.01 US; 60/376,893 01.05.02 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002366086

29 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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