INSULATION TRENCH FOR AN INTEGRATED CIRCUIT AND METHOD FOR PRODUCTION THEREOF

Details for Australian Patent Application No. 2002364274 (hide)

Owner AUSTRIAMICROSYSTEMS AG

Inventors SCHREMS, Martin

Pub. Number AU-A-2002364274

PCT Number PCT/EP02/12838

PCT Pub. Number WO2003/046977

Priority 101 57 785.0 27.11.01 DE

Filing date 15 November 2002

Wipo publication date 10 June 2003

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 101 57 785.0 27.11.01 DE

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002364274

12 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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