PROCESS FOR SYNTHESIZING UNIFORM NANOCRYSTALLINE FILMS

Details for Australian Patent Application No. 2002360479 (hide)

Owner MICHIGAN STATE UNIVERSITY

Inventors ASMUSSEN, Jes; HUANG, Wen-Shin

Pub. Number AU-A-2002360479

PCT Number PCT/US02/38754

PCT Pub. Number WO2003/069018

Priority 10/073,710 11.02.02 US

Filing date 5 December 2002

Wipo publication date 4 September 2003

International Classifications

C23C 016/26 Chemical deposition or plating by decomposition - Deposition of carbon only

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 10/073,710 11.02.02 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002360479

28 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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