DISPERSION MANAGEMENT OPTICAL LITHOGRAPHY CRYSTALS FOR BELOW 160NM OPTICAL LITHOGRAPHY AND METHOD THEREOF

Details for Australian Patent Application No. 2002360365 (hide)

Owner CORNING INCORPORATED

Inventors SPARROW, Robert W

Pub. Number AU-A-2002360365

PCT Number PCT/US02/36052

PCT Pub. Number WO2003/044570

Priority 09/991,399 20.11.01 US

Filing date 12 November 2002

Wipo publication date 10 June 2003

International Classifications

G02B 001/02 Optical elements characterised by the material of which they are made

C30B 029/12 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape

C30B 011/00 Single-crystal-growth by normal freezing or freezing under temperature gradient, e.g. Bridgman- Stockbarger method

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 09/991,399 20.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002360365

5 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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