DEVICE AND METHOD FOR PRODUCING, REMOVING OR TREATING LAYERS ON A SUBSTRATE

Details for Australian Patent Application No. 2002357434 (hide)

Owner OSRAM OPTO SEMICONDUCTORS GMBH

Inventors WECHSELBERGER, Bernd

Pub. Number AU-A-2002357434

PCT Number PCT/DE02/04347

PCT Pub. Number WO2003/048430

Priority 101 57 946.2 27.11.01 DE

Filing date 27 November 2002

Wipo publication date 17 June 2003

International Classifications

C30B 025/14 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Feed and outlet means for the gases

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 March 2003 Complete Application Filed

  Priority application(s): 101 57 946.2 27.11.01 DE

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002357434

12 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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