MIRROR FACET AND FACETTED MIRROR

Details for Australian Patent Application No. 2002356606 (hide)

Owner CARL ZEISS SMT AG

Inventors MANN, Heinz; HEISLER, Andreas; HOLDERER, Hubert; SINGER, Wolfgang; WEISS, Markus; SEIFERT, Andreas; MELZER, Frank

Pub. Number AU-A-2002356606

PCT Number PCT/EP02/12792

PCT Pub. Number WO2003/050586

Priority 101 60 932.9 12.12.01 DE

Filing date 15 November 2002

Wipo publication date 23 June 2003

International Classifications

G02B 007/182 Mountings, adjusting means, or light-tight connections, for optical elements - for mirrors

Event Publications

27 March 2003 Complete Application Filed

  Priority application(s): 101 60 932.9 12.12.01 DE

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002356606

26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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