DYNAMIC CONTROL OF WAFER PROCESSING PATHS IN SEMICONDUCTOR MANUFACTURING PROCESSES

Details for Australian Patent Application No. 2002356020 (hide)

Owner APPLIED MATERIALS, INC.

Inventors WARD, Nicholas, A.; DANIELSON, Richard; COREY, David, B.

Pub. Number AU-A-2002356020

PCT Number PCT/US02/24858

PCT Pub. Number WO2003/017334

Priority 09/927,444 13.08.01 US

Filing date 6 August 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 09/927,444 13.08.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002356020

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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