LITHOGRAPHY SYSTEM COMPRISING A PROTECTED CONVERTER PLATE

Details for Australian Patent Application No. 2002356008 (hide)

Owner MAPPER LITHOGRAPHY IP B.V.

Inventors WIELAND, Marco, Jan-Jaco; KAMPHERBEEK, Bert, Jan; KRUIT, Pieter

Pub. Number AU-A-2002356008

PCT Number PCT/NL02/00541

PCT Pub. Number WO2003/017317

Priority 60/312,169 13.08.01 US

Filing date 13 August 2002

Wipo publication date 3 March 2003

International Classifications

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 60/312,169 13.08.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002356008

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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