DEVICE FOR MANIPULATION OF A COMPOSITE

Details for Australian Patent Application No. 2002355976 (hide)

Owner AIXTRON AG

Inventors KITTEL, Florenz; SCHWAMBERA, Markus

Pub. Number AU-A-2002355976

PCT Number PCT/EP02/05211

PCT Pub. Number WO2003/017332

Priority 101 40 429.8 17.08.01 DE

Filing date 13 May 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 014/04 Coating by vacuum evaporation, by sputtering or by ion implantation - Coating on selected surface areas, e.g. using masks

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 101 40 429.8 17.08.01 DE

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002355976

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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